High vacuum technology for demanding industrial and scientific applications.
What They Do
Turbomolecular pumps use high-speed rotating blades to move gas molecules, delivering the high vacuum levels needed for molecular flow applications. They're typically paired with a two-stage rotary vane or oil-free scroll pump to exhaust to atmosphere.
EXT Turbomolecular Pumps & Turbo Systems
XDS 5
XDS 10
XDS 35
Key Features
- Magnetic bearing options for increased reliability and reduced vibration
- Ceramic ball bearing technology for longer life
- Monobloc rotors, machined from solid bar for stability and design flexibility
- Brushless DC motors available in 24V and 80V variants, matched with dedicated controllers
- Backup power in controllers to safely close the vent valve during a power failure
Corrosive & Semiconductor Applications
For demanding environments like semiconductor wafer processing, Edwards STP-C and STPH-C Maglev turbo pumps offer magnetic bearings built for harsh, corrosive conditions.